Showing 1 - 2 results of 2 for search 'Azali, Muhamad Muizzudin', query time: 0.01s Refine Results
  1. 1
    Optimization of vhf-pecvd deposition parameters for silicon carbide film using in-situ and in-line gas phase analysis
    by Azali, Muhamad Muizzudin
    Published 2022
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  2. 2
    Comparison of the structural properties of silicon carbide using very high frequency plasma enhanced chemical vapour deposition with magnetron sputtering techniques
    by Azali, Muhamad Muizzudin
    Published 2022
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