Penyediaan dan pencirian C54 TiSi2 untuk proses Silisida litar bersepadu CMOS /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | Malay |
| Published: |
Bangi :
Fakulti Kejuruteraan, Universiti Kebangsaan Malaysia,
2001
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| Subjects: | |
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| Physical Description: | xxix , 282 p. : ill. ; 30 cm. |
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| Bibliography: | Senarai rukukan : p.260-266 |