Penyediaan dan pencirian C54 TiSi2 untuk proses Silisida litar bersepadu CMOS /
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主要作者: | Uda Hashim |
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格式: | Thesis 图书 |
语言: | Malay |
出版: |
Bangi :
Fakulti Kejuruteraan, Universiti Kebangsaan Malaysia,
2001
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