Electrostatic comb drive for resonant sensor and actuator applications /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
Barkeley :
University of California,
1990
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| Subjects: | |
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| Physical Description: | xiii, 212 p. : ill. ; 18 cm. |
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| Bibliography: | References : p. 156-163 |