Electrostatic comb drive for resonant sensor and actuator applications /
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Main Author: | |
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Format: | Thesis Book |
Language: | English |
Published: |
Barkeley :
University of California,
1990
|
Subjects: | |
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LEADER | 01231nam a2200313 a 4500 | ||
---|---|---|---|
003 | UKM | ||
005 | 20040802121800.0 | ||
008 | 040715s1990 xxua m 000 0 eng | ||
020 | |c RM252.78 | ||
039 | 9 | |a 200408021218 |b bakar |c 200407220924 |d bedah |c 200407220905 |d bedah |y 07-15-2004 |z mazarita | |
090 | |a TJ223.A25T363 1990 tesis | ||
090 | |a TJ223 | ||
100 | 1 | |a Tang, William Chi-Keung | |
245 | 1 | 0 | |a Electrostatic comb drive for resonant sensor and actuator applications / |c by Willian Chi-Keung Tang |
260 | |a Barkeley : |b University of California, |c 1990 | ||
300 | |a xiii, 212 p. : |b ill. ; |c 18 cm. | ||
502 | |a Thesis (Ph.D.) - University of California, Barkeley, 1990 | ||
504 | |a References : p. 156-163 | ||
610 | 2 | 0 | |a University of California, Berkeley |x Dissertations |
650 | 0 | |a Actuators | |
650 | 0 | |a Resonance | |
650 | 0 | |a Electromechanical devices | |
650 | 0 | |a Dissertations, Academic |z United States | |
907 | |a .b13404829 |b 15-10-20 |c 12-11-19 | ||
998 | |a t |b 07-02-04 |c m |d x |e - |f eng |g xxu |h 0 | ||
914 | |a vtls003292245 | ||
990 | |a sb/za | ||
991 | |a Jabatan Kejuruteraan Mekanik dan Bahan | ||
945 | |g 1 |i 00001331316 |j 0 |l t0013 |n No. of pieces: 1 |o - |p MYR252.78 |q - |r - |s - |t 3 |u 2 |v 0 |w 0 |x 0 |y .i17583937 |z 12-11-19 |