Micro accelerometer design with digital feedback control /

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Bibliographic Details
Main Author: Lemkin, Mark Alan
Format: Thesis Book
Language:English
Published: Barkeley : University of California, 1997
Subjects:
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245 1 0 |a Micro accelerometer design with digital feedback control /  |c by Mark Alan Lemkin 
260 |a Barkeley :  |b University of California,  |c 1997 
300 |a vii, 114 p. :  |b ill.;  |c 18 cm. 
502 |a Thesis (Ph.D.) - University of California, Barkeley, 1997 
504 |a Bibliography : p. 109-114 
610 2 0 |a University of California, Berkeley  |x Dissertations 
650 0 |a Accelerometers 
650 0 |a Microelectromechanical systems 
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