Electrostatic transduction for MEMS resonators /
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
Berkeley, CA :
University of California,
2004
|
| Subjects: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Physical Description: | 57 p. : ill. ; 28 cm. |
|---|