Electrostatic transduction for MEMS resonators /
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| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
Berkeley, CA :
University of California,
2004
|
| Subjects: | |
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| 005 | 20060224160300.0 | ||
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| 020 | |c RM243.39 | ||
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| 090 | |a TK7871.23 |b .B43 2004 | ||
| 100 | 1 | |a Bhave, Sunil Ashok | |
| 245 | 1 | 0 | |a Electrostatic transduction for MEMS resonators / |c by Sunil Ashok Bhave |
| 260 | |a Berkeley, CA : |b University of California, |c 2004 | ||
| 300 | |a 57 p. : |b ill. ; |c 28 cm. | ||
| 502 | |a Theses (Ph.D) - University of California, 2004 | ||
| 610 | 2 | |a University of California |x Dissertations | |
| 650 | 0 | |a Magnetic amplifiers | |
| 650 | 0 | |a Resonators | |
| 650 | 0 | |a Dissertations, Academic |z United States | |
| 907 | |a .b13683809 |b 28-05-21 |c 12-11-19 | ||
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| 991 | |a Institut Kejuruteraan Mikro dan Nanoelektronik | ||
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