Rekabentuk dan fabrikasi diafram beralun silikon untuk sensor tekanan MEMs /
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| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | Malay |
| Published: |
Bangi :
Fakulti Kejuruteraan, Universiti Kebangsaan Malaysia,
2006
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| Subjects: | |
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| LEADER | 01178nam a2200289 a 4500 | ||
|---|---|---|---|
| 003 | UKM | ||
| 005 | 20070523170900.0 | ||
| 008 | 070402s2006 my dja m 000 0 may | ||
| 039 | 9 | |a 200705231709 |b laili |y 04-02-2007 |z norehan | |
| 090 | |a TJ247.N676 2006 tesis | ||
| 090 | |a TJ247 |b .N676 2006 | ||
| 100 | 0 | |a Norhayati Soin | |
| 245 | 1 | 0 | |a Rekabentuk dan fabrikasi diafram beralun silikon untuk sensor tekanan MEMs / |c Norhayati binti Soin |
| 260 | |a Bangi : |b Fakulti Kejuruteraan, Universiti Kebangsaan Malaysia, |c 2006 | ||
| 300 | |a xxiii, 290 p. : |b ill. ; |c 30 cm. | ||
| 502 | |a Tesis (Ph.D) - Universiti Kebangsaan Malaysia, 2006 | ||
| 504 | |a Rujukan : p. [236]-243 | ||
| 610 | 2 | 0 | |a Universiti Kebangsaan Malaysia |x Dissertations |
| 650 | 0 | |a Dissertations, Academic |z Malaysia | |
| 650 | 0 | |a Diaphragm (Mechanical devices) |x Design and construction | |
| 650 | 0 | |a Microelectromechanical systems | |
| 907 | |a .b13891625 |b 15-10-20 |c 12-11-19 | ||
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| 990 | |a NY/nms | ||
| 991 | |a Fakulti Kejuruteraan | ||
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