Pembangunan akselerometer berdasarkan proses polisilikon epitaksi tebal /

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Bibliographic Details
Main Author: Mohd Ismahadi Syono
Format: Thesis Book
Language:Malay
Published: Bangi : Fakulti Kejuruteraan, Universiti Kebangsaan Malaysia, 2008
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Description
Physical Description:xvi, 187 p. : ill., photographs, charts ; 30 cm.
Bibliography:Rujukan : p. [153]-156