Pembangunan akselerometer berdasarkan proses polisilikon epitaksi tebal /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | Malay |
| Published: |
Bangi :
Fakulti Kejuruteraan, Universiti Kebangsaan Malaysia,
2008
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| Subjects: | |
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| Physical Description: | xvi, 187 p. : ill., photographs, charts ; 30 cm. |
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| Bibliography: | Rujukan : p. [153]-156 |