Pembangunan akselerometer berdasarkan proses polisilikon epitaksi tebal /

Pembangunan akselerometer berdasarkan proses polisilikon epitaksi tebal /

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书目详细资料
主要作者:	Mohd Ismahadi Syono
格式:	Thesis 图书
语言:	Malay
出版:	Bangi : Fakulti Kejuruteraan, Universiti Kebangsaan Malaysia, 2008
主题:	Universiti Kebangsaan Malaysia > Dissertations Dissertations, Academic > Malaysia Accelerometers Microelectromechanical systems Thick epitaxial polysilicon
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