Pecvd hydrogenated amorphous carbon films : growth and characterization /

Pecvd hydrogenated amorphous carbon films : growth and characterization /

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书目详细资料
主要作者:	Rozidawati Awang
格式:	Thesis 图书
语言:	English
出版:	2008
主题:	Universiti Malaya > Dissertations Dissertations, Academic > Malaysia Thin films Hydrogenation
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