Fabrikasi sensor tekanan kapasitif sangat rendah (STKSR) menggunakan teknologi proses piawai CMOS /

Fabrikasi sensor tekanan kapasitif sangat rendah (STKSR) menggunakan teknologi proses piawai CMOS /

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书目详细资料
主要作者:	Muhammad Ramdzan Buyong
格式:	Thesis 图书
语言:	Malay
出版:	2010.
主题:	Universiti Kebangsaan Malaysia > Dissertations. Dissertations, Academic > Malaysia. BioMEMS. Metal oxide semiconductors. Detectors. Microelectronics. Microelectromechanical systems. Electromechanical devices.
标签:	添加标签没有标签, 成为第一个标记此记录!

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