Effect of focused ion beam machining parameters on geometrical accuracy of Bio-MEMS /

This thesis introduced focused ion beam (FIB) micromachining as a potential technique to fabricate Bio-MEMS microfluidic devices. This work investigated the influence of three FIB process parameters, which were acceleration voltage, dwell time and milled depth. The response variables were taper angl...

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Bibliographic Details
Main Author: Nurul Hajar binti Mohd Fuad
Format: Thesis
Language:English
Published: Gombak, Selangor : Kulliyyah of Engineeering, International Islamic University Malaysia, 2011
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Online Access:Click here to view 1st 24 pages of the thesis. Members can view fulltext at the specified PCs in the library.
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