Development of MEMS piezoelectronic energy harvesting device for wireless condition monitoring /

Microelectromechanical system (MEMS) vibration based energy harvesters have become significantly popular due to the growing demand of wireless sensor networks which need miniature, portable, long lasting and easily recharged sources of power. Usage of hazardous batteries is an unacceptable solution...

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Bibliographic Details
Main Author: Aliza 'Aini binti Md Ralib @ Md Raghib
Format: Thesis
Language:English
Published: Kuala Lumpur : Kulliyyah of Engineering, International Islamic University Malaysia, 2012
Subjects:
Online Access:Click here to view 1st 24 pages of the thesis. Members can view fulltext at the specified PCs in the library.
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008 121031n2012 my ad g m 000 0 eng d
040 |a UIAM  |b eng 
041 |a eng 
050 0 0 |a TJ808 
100 0 |a Aliza 'Aini binti Md Ralib @ Md Raghib  
245 1 |a Development of MEMS piezoelectronic energy harvesting device for wireless condition monitoring /  |c by Aliza 'Aini binti Md Ralib @ Md Raghib 
260 |a Kuala Lumpur :  |b Kulliyyah of Engineering, International Islamic University Malaysia,   |c 2012 
300 |a xxi, 146 leaves :  |b ill. charts;  |c 30cm. 
336 |2 rdacontent 
337 |2 rdamedia 
338 |2 rdacarrier 
500 |a Abstract in English and arabic. 
500 |a "A dissertation submitted in fulfilment of the requirement for the degree of Master of Science (Electronics Engineering)."--On t.p. 
502 |a Thesis (MSEE)--International Islamic University Malaysia, 2012. 
504 |a Includes bibliographical references (leaves 141-144). 
520 |a Microelectromechanical system (MEMS) vibration based energy harvesters have become significantly popular due to the growing demand of wireless sensor networks which need miniature, portable, long lasting and easily recharged sources of power. Usage of hazardous batteries is an unacceptable solution to power up the densely populated nodes due to their bulky sizes and high battery replacement cost. Piezoelectric devices are the perfect candidate for implementation in micro generators as they are easily fabricated, are silicon compatible and demonstrate high efficiencies for mechanical to electrical energy conversion. This work presents the design, simulation and fabrication of MEMS piezoelectric energy harvesters. The energy harvester was formed using Aluminium doped Zinc Oxide (AZO) cantilever beams with either Aluminium or Steel contacts. FEM simulation analysis was done to obtain the resonance frequency that provides maximum displacement of vibration and maximum output power. AZO/Steel and Al/AZO/Al/Si structures were successfully simulated, fabricated and experimentally measured. The fabricated AZO/Steel beam produced 4.2 Vs/m2 at the resonant frequency of 137.157 Hz. The Al/AZO/Al/Si beam operates at higher frequencies where it produced 3.2 V AC output voltages at resonance frequencies of 8.026 MHz. The proposed designs can be positioned on a gas turbine in power plant where at a critical vibration pattern it will generate power to activate a wireless sensor to caution for maintenance. 
650 0 0 |a Energy harvesting 
650 0 0 |a Energy harvesting  |x Materials  
650 0 0 |a Microelectromechanical systems 
655 7 |a Theses, IIUM local 
690 |a Dissertations, Academic  |x Department of Electrical and Computer Engineering  |z IIUM 
710 2 |a International Islamic University Malaysia.  |b Department of Electrical and Computer Engineering 
856 4 |u http://studentrepo.iium.edu.my/handle/123456789/4653  |z Click here to view 1st 24 pages of the thesis. Members can view fulltext at the specified PCs in the library. 
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