Design and analysis of a first-order sigma-delta converter with CMOS-MEMS differential capacitive sensor /
This dissertation presents the design and analysis of a MEMS accelerometer and its accompanying interface circuitry. The interface circuit is a sigma-delta (Σ-Δ) analog-to-digital converter (ADC) which is capable of converting an analog low voltage (in mV range) and low frequency signal into digital...
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| Main Author: | |
|---|---|
| Format: | Thesis |
| Language: | English |
| Published: |
Kuala Lumpur:
Kulliyyah of Engineering, International Islamic University Malaysia,
2012
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| Subjects: | |
| Online Access: | http://studentrepo.iium.edu.my/handle/123456789/4438 |
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| LEADER | 028620000a22003370004500 | ||
|---|---|---|---|
| 008 | 121030t2012 my a g m 000 0 eng d | ||
| 040 | |a UIAM |b eng | ||
| 041 | |a eng | ||
| 050 | |a TK7887.6 | ||
| 100 | 1 | |a Ma, Li Ya | |
| 245 | 1 | |a Design and analysis of a first-order sigma-delta converter with CMOS-MEMS differential capacitive sensor / |c by Ma Li Ya | |
| 260 | |a Kuala Lumpur: |b Kulliyyah of Engineering, International Islamic University Malaysia, |c 2012 | ||
| 300 | |a xix, 117 leaves : |b ill. ; |c 30cm. | ||
| 500 | |a Abstract in English and Arabic. | ||
| 500 | |a "A dissertation submitted in fulfilment of the requirement for the degree of Master of Science (Electronics Engineering)."--On t.p. | ||
| 502 | |a Thesis (MSEE)--International Islamic University Malaysia, 2012. | ||
| 504 | |a Includes bibliographical references (leaves 101-105). | ||
| 520 | |a This dissertation presents the design and analysis of a MEMS accelerometer and its accompanying interface circuitry. The interface circuit is a sigma-delta (Σ-Δ) analog-to-digital converter (ADC) which is capable of converting an analog low voltage (in mV range) and low frequency signal into digital signals. The first-order 1-bit Σ-Δ ADC is designed and simulated using MATLAB® and CadenceTM Spectre design tools. Σ-Δ converters are preferred for MEMS applications due to its capabilities of processing low output voltages from MEMS sensors and its noise-shaping techniques which push the noise outside the bandwidth of the baseband signals. The MEMS accelerometer is designed as a CMOS-MEMS differential capacitive sensor. The usage of CMOS technology to form the sensor allows integration of the MEMS sensor with its ADC interface circuitry together on the same chip. Each component in the converter is designed and simulated separately using Silterra 0.13um CMOS process technology. Simulation results indicate agreement with the theoretical evaluations. | ||
| 596 | |a 1 | ||
| 650 | |a Digital-to-analog converters |x Design and construction | ||
| 650 | |a Microelectromechanical systems |x Design and construction | ||
| 650 | |a Modulators (Electronics) | ||
| 655 | 7 | |a Theses, IIUM local | |
| 690 | |a Dissertations, Academic |x Department of Electrical and Computer Engineering |z IIUM | ||
| 710 | 2 | |a International Islamic University Malaysia. |b Department of Electrical and Computer Engineering | |
| 856 | 4 | |u http://studentrepo.iium.edu.my/handle/123456789/4438 | |
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