rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Significance of post oxidation annealing (POA) and post metallization annealing (PMA) on the capacitance-voltage characterization of Si3N4 mos capacitor
  name:
    name part: Rosminazuin binti Ab. Rahim
    role:
      role term: creator
    role:
      role term: author
  name:
    name part: Universiti Kebangsaan Malaysia
    name part: Faculty of Electric, Electronic and System Engineering
  genre: Theses, IIUM foreign
  origin info:
    place:
      place term: my
    date issued: 2014
  language:
    language term: eng
  language:
    language term: ma
  language:
    language term: y
  physical description:
    extent: xiv, 53 leaves : illustrations ; 30 cm.
  note: by Rosminazuin Binti Ab Rahim
  note: "Thesis submitted in partial fulfilment for the degree of Master of Science Microelectronics."--On title page.
  note: Thesis (Master of Science Microelectronics)--2014.
  note: Includes bibliographical references (leaves 53).
  note: Abstract in English and Malay.
  classification: TK7871.99.M44
  record info:
    record content source: UIAM
    record creation date: 140703
    language of cataloging:
      language term: eng