Design and modelling of integrated RF MEMS beam resonators /
Recently, there has been interest to design the MicroElectroMechanical System (MEMS) integrated with Complementary Metal-Oxide Semiconductor (CMOS) resonator for RF integrated circuits. This work presents the analytical, simulation and measurement of clamped-clamped and clamped-free beam resonators....
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
Kuala Lumpur :
Kulliyyah of Engineering, International Islamic University Malaysia,
2014
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| Subjects: | |
| Online Access: | Click here to view 1st 24 pages of the thesis. Members can view fulltext at the specified PCs in the library. |
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| LEADER | 027330000a22002770004500 | ||
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| 008 | 140708t2014 my a g m 000 0 eng d | ||
| 040 | |a UIAM |b eng | ||
| 041 | |a eng | ||
| 043 | |a a-my--- | ||
| 050 | 0 | 0 | |a TK7874.78 |
| 100 | 0 | |a Ahmad Anwar bin Zainuddin | |
| 245 | 1 | |a Design and modelling of integrated RF MEMS beam resonators / |c by Ahmad Anwar bin Zainuddin | |
| 260 | |a Kuala Lumpur : |b Kulliyyah of Engineering, International Islamic University Malaysia, |c 2014 | ||
| 300 | |a xvii, 120 leaves : |b ill. ; |c 30cm. | ||
| 502 | |a Thesis (MSEE)--International Islamic University Malaysia, 2014. | ||
| 504 | |a Includes bibliographical references (leaves 112-115). | ||
| 520 | |a Recently, there has been interest to design the MicroElectroMechanical System (MEMS) integrated with Complementary Metal-Oxide Semiconductor (CMOS) resonator for RF integrated circuits. This work presents the analytical, simulation and measurement of clamped-clamped and clamped-free beam resonators. These resonators will be fabricated using commercial CMOS technology and are intended to replace current off-chip resonators. These resonators furnish on-chip low cost solutions for devices with much reduced chip area, besides having considerably reduced insertion losses due to external bond wires. They can be integrated with amplifiers to form oscillators for generating clocks in the 20MHz range. The resonators require approximately 30V DC and 0.2V AC to electro-statically actuate the resonator's beams. The actuation is simulated and measured using Finite modeling software of COMSOL™ and CADENCE™ device simulation of Cadence to obtain optimum design parameters. This paper makes a comparative review of different models for evaluating the designed resonator's performance in terms of resonance frequency, S21-parameters, resonator's equivalent circuit parameters, Q-factor, pull-in voltage, insertion loss and beam's displacement. | ||
| 596 | |a 1 | ||
| 655 | 7 | |a Theses, IIUM local | |
| 690 | |a Dissertations, Academic |x Department of Electrical and Computer Engineering |z IIUM | ||
| 710 | 2 | |a International Islamic University Malaysia. |b Department of Electrical and Computer Engineering | |
| 856 | 4 | |u http://studentrepo.iium.edu.my/handle/123456789/4488 |z Click here to view 1st 24 pages of the thesis. Members can view fulltext at the specified PCs in the library. | |
| 900 | |a sbh-zaj-zhmn-naw | ||
| 999 | |c 438790 |d 469592 | ||
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| 952 | |0 0 |6 TS CDF TK 7874.78 A286D 2014 |7 0 |8 THESES |9 852544 |a IIUM |b IIUM |c MULTIMEDIA |g 0.00 |o ts cdf TK 7874.78 A286D 2014 |p 11100324560 |r 2017-10-26 |t 1 |v 0.00 |y THESISDIG | ||