Design and modelling of integrated RF MEMS beam resonators /

Recently, there has been interest to design the MicroElectroMechanical System (MEMS) integrated with Complementary Metal-Oxide Semiconductor (CMOS) resonator for RF integrated circuits. This work presents the analytical, simulation and measurement of clamped-clamped and clamped-free beam resonators....

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Bibliographic Details
Main Author: Ahmad Anwar bin Zainuddin
Format: Thesis
Language:English
Published: Kuala Lumpur : Kulliyyah of Engineering, International Islamic University Malaysia, 2014
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Online Access:Click here to view 1st 24 pages of the thesis. Members can view fulltext at the specified PCs in the library.
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