Development of surface acoustic wave device based on quartz /
Surface acoustic wave (SAW) device was widely used in sensing and communication application. This work reports on the development of SAW device. ST-cut quartz was chosen as the piezoelectric material as the material has good piezoelectric properties and can work in high temperature. This work addres...
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis |
| Language: | English |
| Published: |
Kuala Lumpur :
Kulliyah of Engineering, International Islamic University Malaysia,
2019
|
| Subjects: | |
| Online Access: | Click here to view 1st 24 pages of the thesis. Members can view fulltext at the specified PCs in the library. |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Summary: | Surface acoustic wave (SAW) device was widely used in sensing and communication application. This work reports on the development of SAW device. ST-cut quartz was chosen as the piezoelectric material as the material has good piezoelectric properties and can work in high temperature. This work addresses the implementation of the SAW device using two different design parameters which are the number of IDT and wavelength. The work begins with finite element modelling using COMSOL Multiphysics. The finite element simulation used to evaluate the performance of the SAW device in terms of resonance frequency, quality factor and electromechanical coupling coefficient. The evaluated quality factor based on finite element simulation shows that the highest quality factor is 928.3 for SAW device with wavelength 20 µm and number of IDT equal to 12. The fabricated devices are based on the optimum design obtained from the simulation results. The microfabrication process includes photolithography process and lift-off process was implemented to fabricate the SAW device. The fabricated SAW device was characterized using SEM microscope and profilometer to measure the width of the IDT and thickness of the metal deposit onto the substrate. The performance of the fabricated SAW device was measured in terms of S-parameter by using vector network analyser and the quality factor if the SAW device was calculated accordingly. Based on the measurement result, the highest quality factor evaluated is 306.58 which occur at SAW device with wavelength of 20 µm and number of IDT equal to 72. This works indicates that SAW device with ST-cut quartz has high potential to be applied for sensing and communication application. |
|---|---|
| Physical Description: | xviii, 106 leaves : colour illustrations ; 30cm. |
| Bibliography: | Includes bibliographical references (leaves 102-105). |