Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers
The effect of cumulative ultraviolet (UV, 4.9eV) irradiation on the p-type silicon wafers, with thermal oxide between 3.3-20.0 nm, was investigated by using the surface photo voltage (SPV) technique. All the experiments were carried out in the silicon processing plant, Shin-Etsu Handotai (M) Sdn Bhd...
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my-mmu-ep.10892010-08-05T03:42:51Z Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers 2006-07 Kang, Ban Hong QC Physics The effect of cumulative ultraviolet (UV, 4.9eV) irradiation on the p-type silicon wafers, with thermal oxide between 3.3-20.0 nm, was investigated by using the surface photo voltage (SPV) technique. All the experiments were carried out in the silicon processing plant, Shin-Etsu Handotai (M) Sdn Bhd, which was located in the free trade zone, Ulu Klang, Selangor. 2006-07 Thesis http://shdl.mmu.edu.my/1089/ http://myto.perpun.net.my/metoalogin/logina.php masters Multimedia University Research Library |
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MMU Institutional Repository |
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QC Physics |
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QC Physics Kang, Ban Hong Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers |
| description |
The effect of cumulative ultraviolet (UV, 4.9eV) irradiation on the p-type silicon wafers, with thermal oxide between 3.3-20.0 nm, was investigated by using the surface photo voltage (SPV) technique. All the experiments were carried out in the silicon processing plant, Shin-Etsu Handotai (M) Sdn Bhd, which was located in the free trade zone, Ulu Klang, Selangor. |
| format |
Thesis |
| qualification_level |
Master's degree |
| author |
Kang, Ban Hong |
| author_facet |
Kang, Ban Hong |
| author_sort |
Kang, Ban Hong |
| title |
Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers |
| title_short |
Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers |
| title_full |
Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers |
| title_fullStr |
Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers |
| title_full_unstemmed |
Surface Photo Voltage Measurement Of Ultra-Violet Irradiation Effects In Oxidized Silicon Wafers |
| title_sort |
surface photo voltage measurement of ultra-violet irradiation effects in oxidized silicon wafers |
| granting_institution |
Multimedia University |
| granting_department |
Research Library |
| publishDate |
2006 |
| _version_ |
1747829288097284096 |