Pulsed Nd-Yag Laser Deposition Of Diamond-Like Carbon Films
In this work, amorphous, diamond-like carbon (DLG) thin films are readily deposited in high vacuum on substrates, by pulsed Nd:YAG laser ablation of graphite target, which may be placed at two different positions with respect to the forward propagation direction of the ablated carbon plume. A parame...
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| Format: | Thesis |
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2007
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| Summary: | In this work, amorphous, diamond-like carbon (DLG) thin films are readily deposited in high vacuum on substrates, by pulsed Nd:YAG laser ablation of graphite target, which may be placed at two different positions with respect to the forward propagation direction of the ablated carbon plume. A parametric study for obtaining high-quality DLC is carried out with the normal plane deposition. |
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