Automated Lithographic Patterning Via Anodic Oxidation On Silicon Substrate
AFM is able to form localized oxide structures by applying a negative voltage through the tip, which acts like a \'pen\' to \'draw\' oxide lines on the substrate surface. This provides a simple and low cost technique to create nanoscale oxide patterns. However, the lack of contro...
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Main Author: | Jin, Gan Yeow |
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Format: | Thesis |
Published: |
2010
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