A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering

A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering

This thesis demonstrates particular methodology developed for growing zinc oxide (ZnO) thin films by direct current (DC) plasma magnetron sputtering deposition technique,as well as ZnO films application for transparent untraviolet (UV) sensor. The scope of the thesis entails the development of the p...

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Main Author: Hoon , Jian Wei
Format: Thesis
Published: 2011
Subjects:
QC Physics
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spelling my-mmu-ep.38402013-02-25T00:38:28Z A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering 2011 Hoon , Jian Wei QC Physics This thesis demonstrates particular methodology developed for growing zinc oxide (ZnO) thin films by direct current (DC) plasma magnetron sputtering deposition technique,as well as ZnO films application for transparent untraviolet (UV) sensor. The scope of the thesis entails the development of the processing technology for the fabrication of ZnO films. 2011 Thesis http://shdl.mmu.edu.my/3840/ http://vlib.mmu.edu.my/diglib/login/dlusr/login.php masters Multimedia University Faculty of Engineering
institution Multimedia University
collection MMU Institutional Repository
topic QC Physics
spellingShingle QC Physics
Hoon , Jian Wei
A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering
description This thesis demonstrates particular methodology developed for growing zinc oxide (ZnO) thin films by direct current (DC) plasma magnetron sputtering deposition technique,as well as ZnO films application for transparent untraviolet (UV) sensor. The scope of the thesis entails the development of the processing technology for the fabrication of ZnO films.
format Thesis
qualification_level Master's degree
author Hoon , Jian Wei
author_facet Hoon , Jian Wei
author_sort Hoon , Jian Wei
title A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering
title_short A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering
title_full A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering
title_fullStr A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering
title_full_unstemmed A Study Of Material Properties Of Zn0 Thin Films Deposited By Direct Current Magnetron Sputtering
title_sort study of material properties of zn0 thin films deposited by direct current magnetron sputtering
granting_institution Multimedia University
granting_department Faculty of Engineering
publishDate 2011
_version_ 1747829555453755392

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