APA (7th ed.) Citation

Koh, S. F. (2014). Electric-field enhanced diffusion and polysilicon gettering of copper and iron in silicon wafer.

Chicago Style (17th ed.) Citation

Koh, Song Foo. Electric-field Enhanced Diffusion and Polysilicon Gettering of Copper and Iron in Silicon Wafer. 2014.

MLA (8th ed.) Citation

Koh, Song Foo. Electric-field Enhanced Diffusion and Polysilicon Gettering of Copper and Iron in Silicon Wafer. 2014.

Warning: These citations may not always be 100% accurate.