Electric-field enhanced diffusion and polysilicon gettering of copper and iron in silicon wafer

Electric-field enhanced diffusion and polysilicon gettering of copper and iron in silicon wafer

Copper (Cu) and iron (Fe) impurities in the silicon bulk of highly borondoped silicon wafers were investigated using the Dynamic Secondary Ion Mass Spectrometry (D-SIMS). Competition between segregation at the highly boron-doped and polysilicon layer was observed. Enhanced gettering into polysilicon...

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书目详细资料
主要作者:	Koh, Song Foo
格式:	Thesis
出版:	2014
主题:	TK7800-8360 Electronics
标签:	添加标签没有标签, 成为第一个标记此记录!

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