Electric-field enhanced diffusion and polysilicon gettering of copper and iron in silicon wafer

Electric-field enhanced diffusion and polysilicon gettering of copper and iron in silicon wafer

Copper (Cu) and iron (Fe) impurities in the silicon bulk of highly borondoped silicon wafers were investigated using the Dynamic Secondary Ion Mass Spectrometry (D-SIMS). Competition between segregation at the highly boron-doped and polysilicon layer was observed. Enhanced gettering into polysilicon...

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書目詳細資料
主要作者:	Koh, Song Foo
格式:	Thesis
出版:	2014
主題:	TK7800-8360 Electronics
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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