Fabrication and characterisation of magnetron sputtered copper thin films
Applications of copper (Cu) thin films have emerged from microelectronics to nanotechnology. The primary applications of Cu are as interconnects in microelectronics. With the rapid shrinking in the size of electronic devices, the Cu thin films play an essential role in conductors and optical data st...
Saved in:
| 主要作者: | |
|---|---|
| 格式: | Thesis |
| 出版: |
2011
|
| 主題: | |
| 標簽: |
添加標簽
沒有標簽, 成為第一個標記此記錄!
|