Low Frequency Noise Measurements And Analysis Of Capacitive Micro-Accelerometers

Capacitive-sensing micro-accelerometers are being used by the hundreds of millions in the automobile safety systems, health care and consumer electronics products. Their performance is limited by the combined effects of the thermally-dependant electrical and mechanical noise sources. They limit the...

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Bibliographic Details
Main Author:	Mohd Yasin, Faisal
Format:	Thesis
Published:	2014
Subjects:	TL500-777 Aeronautics Aeronautical engineering
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id	my-mmu-ep.8060
record_format	uketd_dc
spelling	my-mmu-ep.80602023-02-23T07:42:14Z Low Frequency Noise Measurements And Analysis Of Capacitive Micro-Accelerometers 2014-01 Mohd Yasin, Faisal TL500-777 Aeronautics. Aeronautical engineering Capacitive-sensing micro-accelerometers are being used by the hundreds of millions in the automobile safety systems, health care and consumer electronics products. Their performance is limited by the combined effects of the thermally-dependant electrical and mechanical noise sources. They limit the detectable levels of the devices for low acceleration and their precision in high accuracy applications. A thorough review of noise in MEMS, including micro-accelerometers, was published as part of the background studies for this research. Two research groups from Tohoku and Michigan investigated both noise sources of their prototypes at room temperature. Their results showed the existence of 1/f noise at low frequencies, and white noise at higher frequencies. The 1/f noise is thought to be electrical in origin. However, both groups reported mismatches between simulated and measured data. Concurrently, another group from TU-Delft characterized directly the mechanical-thermal noise spectrum from their custom micro-sensors without the electronics system. They demonstrated the existence of ambient pressure-independent 1/f noise, and noted the likelihood of its having mechanical origin. These results demonstrate the need to perform further noise studies on capacitive micro-accelerometers. The data could be useful when these devices are used for critical applications, such as rate responsive heart pacemakers and defibrillators. This thesis describes custom apparatus and measurement techniques to study the low frequency noise characteristics of commercial capacitive micro-accelerometers. They were used to demonstrate the dependence of noise on temperature and acceleration, the two most dynamic parameters that affect the output accuracies. 2014-01 Thesis http://shdl.mmu.edu.my/8060/ http://erep.mmu.edu.my/ phd doctoral Multimedia University Faculty of Engineering EREP ID: 895
institution	Multimedia University
collection	MMU Institutional Repository
topic	TL500-777 Aeronautics Aeronautical engineering
spellingShingle	TL500-777 Aeronautics Aeronautical engineering Mohd Yasin, Faisal Low Frequency Noise Measurements And Analysis Of Capacitive Micro-Accelerometers
description	Capacitive-sensing micro-accelerometers are being used by the hundreds of millions in the automobile safety systems, health care and consumer electronics products. Their performance is limited by the combined effects of the thermally-dependant electrical and mechanical noise sources. They limit the detectable levels of the devices for low acceleration and their precision in high accuracy applications. A thorough review of noise in MEMS, including micro-accelerometers, was published as part of the background studies for this research. Two research groups from Tohoku and Michigan investigated both noise sources of their prototypes at room temperature. Their results showed the existence of 1/f noise at low frequencies, and white noise at higher frequencies. The 1/f noise is thought to be electrical in origin. However, both groups reported mismatches between simulated and measured data. Concurrently, another group from TU-Delft characterized directly the mechanical-thermal noise spectrum from their custom micro-sensors without the electronics system. They demonstrated the existence of ambient pressure-independent 1/f noise, and noted the likelihood of its having mechanical origin. These results demonstrate the need to perform further noise studies on capacitive micro-accelerometers. The data could be useful when these devices are used for critical applications, such as rate responsive heart pacemakers and defibrillators. This thesis describes custom apparatus and measurement techniques to study the low frequency noise characteristics of commercial capacitive micro-accelerometers. They were used to demonstrate the dependence of noise on temperature and acceleration, the two most dynamic parameters that affect the output accuracies.
format	Thesis
qualification_name	Doctor of Philosophy (PhD.)
qualification_level	Doctorate
author	Mohd Yasin, Faisal
author_facet	Mohd Yasin, Faisal
author_sort	Mohd Yasin, Faisal
title	Low Frequency Noise Measurements And Analysis Of Capacitive Micro-Accelerometers
title_short	Low Frequency Noise Measurements And Analysis Of Capacitive Micro-Accelerometers
title_full	Low Frequency Noise Measurements And Analysis Of Capacitive Micro-Accelerometers
title_fullStr	Low Frequency Noise Measurements And Analysis Of Capacitive Micro-Accelerometers
title_full_unstemmed	Low Frequency Noise Measurements And Analysis Of Capacitive Micro-Accelerometers
title_sort	low frequency noise measurements and analysis of capacitive micro-accelerometers
granting_institution	Multimedia University
granting_department	Faculty of Engineering
publishDate	2014
_version_	1776101415847985152

Low Frequency Noise Measurements And Analysis Of Capacitive Micro-Accelerometers

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