Free-space microwave measurement of doping concentration for silicon wafer / Alyaa Syaza Azini
Microwave non-destructive testing (MNDT) using free space microwave measurement (FSMM) system is used to characterize silicon semiconductor wafers from reflection and transmission coefficients. The FSMM system consists of transmit and receive spot-focusing horn lens antenna, mode transitions, coaxia...
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| Format: | Thesis |
| Language: | English |
| Published: |
2011
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| Online Access: | https://ir.uitm.edu.my/id/eprint/68104/1/68104.PDF |
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