Fabrication of porous silicon nanostuctures chemical sensor / Mohd Husairi Fadzilah Suhaimi

Porous Silicon Nanostructures (PSiN) was prepared by electrochemical etching using ptype Si wafer substrate with constant current density, 20 mA/cm2. Ethanoic hydrofluoric acid (HF) 48% electrolyte and ethanol (C2H5OH) at ratio 1:1 electrolyte was used. The sample was characterized by using Photolum...

Full description

Saved in:
Bibliographic Details
Main Author: Fadzilah Suhaimi, Mohd Husairi
Format: Thesis
Language:English
Published: 2010
Online Access:https://ir.uitm.edu.my/id/eprint/72745/1/72745.pdf
Tags: Add Tag
No Tags, Be the first to tag this record!