Fabrication and characterization of porous silicon by two-step anodization using alternating current photo-assisted electrochemical (ACPEC) etching / Fatimah Zulkifli
There are several reliable etching techniques to produce a uniform porous silicon (Si) structure on the semiconductor. Wet etching technique that is commonly used such as metal-assisted electroless etching and direct current photoelectrochemical (DCPEC) etching techniques often produced a non-unifor...
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| Format: | Thesis |
| Language: | English |
| Published: |
2022
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| Subjects: | |
| Online Access: | https://ir.uitm.edu.my/id/eprint/78107/1/78107.pdf |
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