Design of a pressure controller for a thermal evaporation system / Ahmad Suffian Muhammad
This project describes the method of designing a pressure controller for vacuum pressure control system well suit for evaporation and deposition of amorphous silicon thin film. The constant total pressure or pressure not less than I 0·5 torr is required during the conditioning of the vacuum to contr...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2009
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| Online Access: | https://ir.uitm.edu.my/id/eprint/84628/1/84628.PDF |
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