Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad

This thesis report on fabrication technique of electride pattern using e-beam lithography and wet etching procss on lead zirconate titanate thin film. The patterns were created using Raith software,

Saved in:

Bibliographic Details
Main Author:	Muhamad, Suriati
Format:	Thesis
Language:	English
Published:	2014
Online Access:	https://ir.uitm.edu.my/id/eprint/86983/1/86983.PDF
Tags:	Add Tag No Tags, Be the first to tag this record!

id	my-uitm-ir.86983
record_format	uketd_dc
spelling	my-uitm-ir.869832024-03-14T08:44:51Z Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad 2014 Muhamad, Suriati This thesis report on fabrication technique of electride pattern using e-beam lithography and wet etching procss on lead zirconate titanate thin film. The patterns were created using Raith software, 2014 Thesis https://ir.uitm.edu.my/id/eprint/86983/ https://ir.uitm.edu.my/id/eprint/86983/1/86983.PDF text en public degree Universiti Teknologi MARA (UiTM) Faculty of Electrical Engineering Awang, Zaiki (Assoc. Prof. Dr.)
institution	Universiti Teknologi MARA
collection	UiTM Institutional Repository
language	English
advisor	Awang, Zaiki (Assoc. Prof. Dr.)
description	This thesis report on fabrication technique of electride pattern using e-beam lithography and wet etching procss on lead zirconate titanate thin film. The patterns were created using Raith software,
format	Thesis
qualification_level	Bachelor degree
author	Muhamad, Suriati
spellingShingle	Muhamad, Suriati Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad
author_facet	Muhamad, Suriati
author_sort	Muhamad, Suriati
title	Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad
title_short	Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad
title_full	Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad
title_fullStr	Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad
title_full_unstemmed	Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad
title_sort	generation of rfic electrode patterns using electron beam lithography and wet etching characteristic of pzt thin film / suriati muhamad
granting_institution	Universiti Teknologi MARA (UiTM)
granting_department	Faculty of Electrical Engineering
publishDate	2014
url	https://ir.uitm.edu.my/id/eprint/86983/1/86983.PDF
_version_	1794192105942286336

Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad

Similar Items