Generation of RFIC electrode patterns using electron beam lithography and wet etching characteristic of PZT thin film / Suriati Muhamad

This thesis report on fabrication technique of electride pattern using e-beam lithography and wet etching procss on lead zirconate titanate thin film. The patterns were created using Raith software,

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Bibliographic Details
Main Author: Muhamad, Suriati
Format: Thesis
Language:English
Published: 2014
Online Access:https://ir.uitm.edu.my/id/eprint/86983/1/86983.PDF
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