Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method

The deposition of diamond films on a silicon nitride (Si3N4) substrate is an attractive technique for industrial applications because of the excellent properties of diamond.Diamond possesses remarkable physical and mechanical properties such as chemical resistant,extreme hardness and highly wears re...

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Main Author:	Dayangku Noorfazidah, Awang Sh'ri
Format:	Thesis
Language:	English
Published:	2009
Subjects:	TA Engineering (General) Civil engineering (General)
Online Access:	http://umpir.ump.edu.my/id/eprint/3853/1/Effect%20of%20surface%20pretreatments%20on%20the%20deposition%20of%20polycrystalline%20diamond%20on%20silicon%20nitride%20substrates.wm.pdf
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spelling	my-ump-ir.38532023-07-13T07:15:18Z Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method 2009-05 Dayangku Noorfazidah, Awang Sh'ri TA Engineering (General). Civil engineering (General) The deposition of diamond films on a silicon nitride (Si3N4) substrate is an attractive technique for industrial applications because of the excellent properties of diamond.Diamond possesses remarkable physical and mechanical properties such as chemical resistant,extreme hardness and highly wears resistant.Pretreatment of substrate is very important prior to diamond deposition to promote nucleation and adhesion between coating and substrate. Polycrystalline diamonds films have been deposited on silicon nitride substrate by Hot Filament Chemical Vapor Deposition (HF-CVD)method.The Si 3N4 substrates have been subjected to various pretreatment methods prior to diamond deposition namely chemical etching and mechanical abrasion.The structure and morphology of diamond coating have been studied using X-ray Diffraction (XRD) and Scanning Electron Microscopy (SEM) while diamond film quality has been characterized using Raman spectroscopy.The adhesion of diamond films has been determined qualitatively by using Vickers hardness tester.It was found that the diamond films formed on chemical pretreated substrates has cauliflower morphology and low adhesive strength but also have low surface roughness.Substrates that pretreated with sand blasting have yield diamond film with well-facetted morphology with high crystallinity and better adhesion. However,the surface roughness of the diamond film deposited on substrates pretreated with blasting are also higher. 2009-05 Thesis http://umpir.ump.edu.my/id/eprint/3853/ http://umpir.ump.edu.my/id/eprint/3853/1/Effect%20of%20surface%20pretreatments%20on%20the%20deposition%20of%20polycrystalline%20diamond%20on%20silicon%20nitride%20substrates.wm.pdf pdf en public masters Universiti Teknologi Malaysia Faculty of Mechanical Engineering HAMZAH., ESAH
institution	Universiti Malaysia Pahang Al-Sultan Abdullah
collection	UMPSA Institutional Repository
language	English
advisor	HAMZAH., ESAH
topic	TA Engineering (General) Civil engineering (General)
spellingShingle	TA Engineering (General) Civil engineering (General) Dayangku Noorfazidah, Awang Sh'ri Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method
description	The deposition of diamond films on a silicon nitride (Si3N4) substrate is an attractive technique for industrial applications because of the excellent properties of diamond.Diamond possesses remarkable physical and mechanical properties such as chemical resistant,extreme hardness and highly wears resistant.Pretreatment of substrate is very important prior to diamond deposition to promote nucleation and adhesion between coating and substrate. Polycrystalline diamonds films have been deposited on silicon nitride substrate by Hot Filament Chemical Vapor Deposition (HF-CVD)method.The Si 3N4 substrates have been subjected to various pretreatment methods prior to diamond deposition namely chemical etching and mechanical abrasion.The structure and morphology of diamond coating have been studied using X-ray Diffraction (XRD) and Scanning Electron Microscopy (SEM) while diamond film quality has been characterized using Raman spectroscopy.The adhesion of diamond films has been determined qualitatively by using Vickers hardness tester.It was found that the diamond films formed on chemical pretreated substrates has cauliflower morphology and low adhesive strength but also have low surface roughness.Substrates that pretreated with sand blasting have yield diamond film with well-facetted morphology with high crystallinity and better adhesion. However,the surface roughness of the diamond film deposited on substrates pretreated with blasting are also higher.
format	Thesis
qualification_level	Master's degree
author	Dayangku Noorfazidah, Awang Sh'ri
author_facet	Dayangku Noorfazidah, Awang Sh'ri
author_sort	Dayangku Noorfazidah, Awang Sh'ri
title	Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method
title_short	Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method
title_full	Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method
title_fullStr	Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method
title_full_unstemmed	Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method
title_sort	effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method
granting_institution	Universiti Teknologi Malaysia
granting_department	Faculty of Mechanical Engineering
publishDate	2009
url	http://umpir.ump.edu.my/id/eprint/3853/1/Effect%20of%20surface%20pretreatments%20on%20the%20deposition%20of%20polycrystalline%20diamond%20on%20silicon%20nitride%20substrates.wm.pdf
_version_	1783731909452365824

Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method

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