Surface morphology, optical and electrical properties of porous silicon produced by chemical etching

In past decades, silicon is commonly used in the semiconductor industry. Recently, researcher extensively studied the porous silicon produced by electrochemical etching because there is possibility to develop a new approach in developing optoelectronic devices, solar cell and sensor. In this researc...

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Main Author:	Tham, Dwight Jern Ee
Format:	Thesis
Language:	English
Subjects:	QC 6118 .S5 T4 2011 Tesis FST 2011 Porous silicon
Online Access:	http://umt-ir.umt.edu.my:8080/jspui/bitstream/123456789/3010/1/QC%206118%20.S5%20T4%202011%20Abstract.pdf http://umt-ir.umt.edu.my:8080/jspui/bitstream/123456789/3010/2/QC%206118%20.S5%20T4%202011%20FullText.pdf
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id	my-umt-ir.-3010
record_format	uketd_dc
spelling	my-umt-ir.-30102014-05-18T06:43:31Z Surface morphology, optical and electrical properties of porous silicon produced by chemical etching Tham, Dwight Jern Ee In past decades, silicon is commonly used in the semiconductor industry. Recently, researcher extensively studied the porous silicon produced by electrochemical etching because there is possibility to develop a new approach in developing optoelectronic devices, solar cell and sensor. In this research, the Porous Silicon (PS) was fabricated by chemical etching method on the P-type silicon wafer in the mixture of hydrofluoric acid (HF) etchant with different concentration of nitric acid(HN03) of 20%, 40%, 65% and at different etching time of 5, 10, 15, 20, 25 minutes. Terengganu: Universiti Malaysia Terengganu 2011-09 Thesis en http://dspace.psnz.umt.edu.my/xmlui/handle/123456789/3010 http://umt-ir.umt.edu.my:8080/jspui/bitstream/123456789/3010/1/QC%206118%20.S5%20T4%202011%20Abstract.pdf 47491ac1e0746683ebaf5409fec04ae1 http://umt-ir.umt.edu.my:8080/jspui/bitstream/123456789/3010/2/QC%206118%20.S5%20T4%202011%20FullText.pdf c8b93a829536f3da3b80e800fb1d9975 http://umt-ir.umt.edu.my:8080/jspui/bitstream/123456789/3010/3/license.txt 8a4605be74aa9ea9d79846c1fba20a33 QC 6118 .S5 T4 2011 Tham, Dwight Jern Ee Tesis FST 2011 Porous silicon
institution	Universiti Malaysia Terengganu
collection	UMT Repository System
language	English
topic	QC 6118 .S5 T4 2011 QC 6118 .S5 T4 2011 Tesis FST 2011 Porous silicon
spellingShingle	QC 6118 .S5 T4 2011 QC 6118 .S5 T4 2011 Tesis FST 2011 Porous silicon Tham, Dwight Jern Ee Surface morphology, optical and electrical properties of porous silicon produced by chemical etching
description	In past decades, silicon is commonly used in the semiconductor industry. Recently, researcher extensively studied the porous silicon produced by electrochemical etching because there is possibility to develop a new approach in developing optoelectronic devices, solar cell and sensor. In this research, the Porous Silicon (PS) was fabricated by chemical etching method on the P-type silicon wafer in the mixture of hydrofluoric acid (HF) etchant with different concentration of nitric acid(HN03) of 20%, 40%, 65% and at different etching time of 5, 10, 15, 20, 25 minutes.
format	Thesis
author	Tham, Dwight Jern Ee
author_facet	Tham, Dwight Jern Ee
author_sort	Tham, Dwight Jern Ee
title	Surface morphology, optical and electrical properties of porous silicon produced by chemical etching
title_short	Surface morphology, optical and electrical properties of porous silicon produced by chemical etching
title_full	Surface morphology, optical and electrical properties of porous silicon produced by chemical etching
title_fullStr	Surface morphology, optical and electrical properties of porous silicon produced by chemical etching
title_full_unstemmed	Surface morphology, optical and electrical properties of porous silicon produced by chemical etching
title_sort	surface morphology, optical and electrical properties of porous silicon produced by chemical etching
granting_institution	Terengganu: Universiti Malaysia Terengganu
url	http://umt-ir.umt.edu.my:8080/jspui/bitstream/123456789/3010/1/QC%206118%20.S5%20T4%202011%20Abstract.pdf http://umt-ir.umt.edu.my:8080/jspui/bitstream/123456789/3010/2/QC%206118%20.S5%20T4%202011%20FullText.pdf
_version_	1747835855795388416

Surface morphology, optical and electrical properties of porous silicon produced by chemical etching

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