Fabrication and characterization of silicon based vertical electrode nanogap biosensor for protein detection

The nanogap biosensor is a new class of device that has attracted attention and great interest among the researchers due to their potential applications in nanotechnology. This nanogap device which are fabricated using standard Complimentary Metal Oxide Semiconductor (CMOS) technology, have the pote...

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Main Author:	Norbi Hayati, Mohd Noor
Format:	Thesis
Language:	English
Subjects:	Nanogap biosensor Nanotechnology Protein detection Deoxyribonucleic acid (DNA)
Online Access:	http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/12924/1/p.%201-24.pdf http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/12924/2/Full%20Text.pdf
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spelling	my-unimap-129242011-07-01T08:06:32Z Fabrication and characterization of silicon based vertical electrode nanogap biosensor for protein detection Norbi Hayati, Mohd Noor The nanogap biosensor is a new class of device that has attracted attention and great interest among the researchers due to their potential applications in nanotechnology. This nanogap device which are fabricated using standard Complimentary Metal Oxide Semiconductor (CMOS) technology, have the potential to serve as the biomolecular junctions because their size reduces electrode polarization effects regardless of frequency. This junction technology is essentially a biology-to-digital converter system that enables real time conversion of biomolecular dielectric signals into digital information. This nanogap biosensor consists of a heavily doped silicon substrate electrode and poly-silicon electrode vertically separated by a fixed distance of 80 nm silicon oxide spacer. The process flow development in this research consists of detailed parameters and recipes to define the nanogap spacer. Two (2) types of masks are used in the process which are the Electrode Mask and the Aluminum Pad Mask. Both masks are designed by using the AutoCAD software and transferred onto a transparency. The main focus in this research is to create the gap spacer by using Inductive Coupled Plasma – Reactive Ion Etch (ICP- RIE) to etch the poly-silicon layer and buffered hydrofluoric acid (HF) to etch the silicon oxide layer. However, the silicon oxide was not completely etched, so that the remaining will act as the mechanical spacer gap. The final step involved sputtering and patterning aluminum onto contact pads using a standard photolithography technique. This was done to help minimize the variability in contact resistance when the nanogap device was probed. The overall goal of this research is to design, fabricate, characterize, and test the silicon based vertical electrode nanogap biosensor that will be used to detect and identify target proteins in aqueous solution. Universiti Malaysia Perlis 2009 Thesis en http://dspace.unimap.edu.my/123456789/12924 http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/12924/1/p.%201-24.pdf 45253c2fa1033e42601937374a2d3c7c http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/12924/2/Full%20Text.pdf 6b4b23a15082c10b12b78656a9647a03 http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/12924/3/license.txt 697c0f13f617f7f85e1a9b7b1df1127c Nanogap biosensor Nanotechnology Protein detection Deoxyribonucleic acid (DNA) School of Microelectronic Engineering
institution	Universiti Malaysia Perlis
collection	UniMAP Institutional Repository
language	English
topic	Nanogap biosensor Nanotechnology Protein detection Deoxyribonucleic acid (DNA)
spellingShingle	Nanogap biosensor Nanotechnology Protein detection Deoxyribonucleic acid (DNA) Norbi Hayati, Mohd Noor Fabrication and characterization of silicon based vertical electrode nanogap biosensor for protein detection
description	The nanogap biosensor is a new class of device that has attracted attention and great interest among the researchers due to their potential applications in nanotechnology. This nanogap device which are fabricated using standard Complimentary Metal Oxide Semiconductor (CMOS) technology, have the potential to serve as the biomolecular junctions because their size reduces electrode polarization effects regardless of frequency. This junction technology is essentially a biology-to-digital converter system that enables real time conversion of biomolecular dielectric signals into digital information. This nanogap biosensor consists of a heavily doped silicon substrate electrode and poly-silicon electrode vertically separated by a fixed distance of 80 nm silicon oxide spacer. The process flow development in this research consists of detailed parameters and recipes to define the nanogap spacer. Two (2) types of masks are used in the process which are the Electrode Mask and the Aluminum Pad Mask. Both masks are designed by using the AutoCAD software and transferred onto a transparency. The main focus in this research is to create the gap spacer by using Inductive Coupled Plasma – Reactive Ion Etch (ICP- RIE) to etch the poly-silicon layer and buffered hydrofluoric acid (HF) to etch the silicon oxide layer. However, the silicon oxide was not completely etched, so that the remaining will act as the mechanical spacer gap. The final step involved sputtering and patterning aluminum onto contact pads using a standard photolithography technique. This was done to help minimize the variability in contact resistance when the nanogap device was probed. The overall goal of this research is to design, fabricate, characterize, and test the silicon based vertical electrode nanogap biosensor that will be used to detect and identify target proteins in aqueous solution.
format	Thesis
author	Norbi Hayati, Mohd Noor
author_facet	Norbi Hayati, Mohd Noor
author_sort	Norbi Hayati, Mohd Noor
title	Fabrication and characterization of silicon based vertical electrode nanogap biosensor for protein detection
title_short	Fabrication and characterization of silicon based vertical electrode nanogap biosensor for protein detection
title_full	Fabrication and characterization of silicon based vertical electrode nanogap biosensor for protein detection
title_fullStr	Fabrication and characterization of silicon based vertical electrode nanogap biosensor for protein detection
title_full_unstemmed	Fabrication and characterization of silicon based vertical electrode nanogap biosensor for protein detection
title_sort	fabrication and characterization of silicon based vertical electrode nanogap biosensor for protein detection
granting_institution	Universiti Malaysia Perlis
granting_department	School of Microelectronic Engineering
url	http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/12924/1/p.%201-24.pdf http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/12924/2/Full%20Text.pdf
_version_	1747836766853791744

Fabrication and characterization of silicon based vertical electrode nanogap biosensor for protein detection

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