Microchannel interrogation with twyman-green interferometer

The Twyman-Green Interferometer (TGI) setup for measuring microfluidic channel depth has been developed. The main objective of this study is to develop a non-contact measuring instrument capable of performing depth measurements of a microfluidic channel made of silica wafer. The microfluidic channel...

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Main Author:	Wan Mokhdzani, Wan Nor Haimi
Format:	Thesis
Language:	English
Subjects:	Microchannel Twyman-Green interferometer (TGI) Microfluidic channel
Online Access:	http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/33279/1/P.1-24.pdf http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/33279/2/Full%20text.pdf
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id	my-unimap-33279
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spelling	my-unimap-332792014-04-01T01:42:05Z Microchannel interrogation with twyman-green interferometer Wan Mokhdzani, Wan Nor Haimi The Twyman-Green Interferometer (TGI) setup for measuring microfluidic channel depth has been developed. The main objective of this study is to develop a non-contact measuring instrument capable of performing depth measurements of a microfluidic channel made of silica wafer. The microfluidic channel is fabricated using the photolithography process and reactive ion etching. Microfluidic channel depth has been measured with the Twyman-Green Interferometer setup. The interferometer setup relies on the optical path length change caused by the rotating transparent silica reference sample in one of its arms. Intensity of fringes produced by the interferometer is detected and recorded with a corresponding photodiode. The intensity results are plotted against the optical path variation of the reference sample which causes an optical path difference in the reference arm. Depth measurement of the microfluidic channel has been extracted from the optical path difference obtained from the interferometer setup. Transparent silica reference samples with etched thickness of 0.681 μm (Ref 1), 1.396 μm (Ref 2) and 2.102 μm (Ref 3) has been used to investigate and determine which is the most accurate reference sample to be used in determining depth of microfluidic channel. Depth of microfluidic channel obtained from Twyman-Green Interferometer has been compared to depth results obtained from atomic force microscopy and surface profilometer. Applying Ref 1, Ref 2 and Ref 3 as rotating reference samples yielded 94.45 %, 84.76 % and 66.97 % compliance with measured depth obtained from surface profilometer. Although there are slight variations with results obtained from surface profilometer and atomic force microscopy, the experimental results proves that the Twyman-Green Interferometer is able to determine microfluidic channel depth and etched depth of thin Si samples. Resolution of the TGI setup is 0.27 μm and is suitable to measure depth profiles ranging from 0.27 μm to 5 μm. Therefore, the modified TGI setup in this research is suitable for measurements of depths or thickness profiles ranging from 0.27 μm to 5 μm with a fringe visibility of more than 0.5. Universiti Malaysia Perlis (UniMAP) 2011 Thesis en http://dspace.unimap.edu.my:80/dspace/handle/123456789/33279 http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/33279/1/P.1-24.pdf c8659546eba6e7cb0c0f7455db129310 http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/33279/2/Full%20text.pdf 2e33fa0ee540248a28dcb01924910154 http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/33279/3/license.txt 8a4605be74aa9ea9d79846c1fba20a33 Microchannel Twyman-Green interferometer (TGI) Microfluidic channel School of Microelectronic Engineering
institution	Universiti Malaysia Perlis
collection	UniMAP Institutional Repository
language	English
topic	Microchannel Twyman-Green interferometer (TGI) Microfluidic channel
spellingShingle	Microchannel Twyman-Green interferometer (TGI) Microfluidic channel Wan Mokhdzani, Wan Nor Haimi Microchannel interrogation with twyman-green interferometer
description	The Twyman-Green Interferometer (TGI) setup for measuring microfluidic channel depth has been developed. The main objective of this study is to develop a non-contact measuring instrument capable of performing depth measurements of a microfluidic channel made of silica wafer. The microfluidic channel is fabricated using the photolithography process and reactive ion etching. Microfluidic channel depth has been measured with the Twyman-Green Interferometer setup. The interferometer setup relies on the optical path length change caused by the rotating transparent silica reference sample in one of its arms. Intensity of fringes produced by the interferometer is detected and recorded with a corresponding photodiode. The intensity results are plotted against the optical path variation of the reference sample which causes an optical path difference in the reference arm. Depth measurement of the microfluidic channel has been extracted from the optical path difference obtained from the interferometer setup. Transparent silica reference samples with etched thickness of 0.681 μm (Ref 1), 1.396 μm (Ref 2) and 2.102 μm (Ref 3) has been used to investigate and determine which is the most accurate reference sample to be used in determining depth of microfluidic channel. Depth of microfluidic channel obtained from Twyman-Green Interferometer has been compared to depth results obtained from atomic force microscopy and surface profilometer. Applying Ref 1, Ref 2 and Ref 3 as rotating reference samples yielded 94.45 %, 84.76 % and 66.97 % compliance with measured depth obtained from surface profilometer. Although there are slight variations with results obtained from surface profilometer and atomic force microscopy, the experimental results proves that the Twyman-Green Interferometer is able to determine microfluidic channel depth and etched depth of thin Si samples. Resolution of the TGI setup is 0.27 μm and is suitable to measure depth profiles ranging from 0.27 μm to 5 μm. Therefore, the modified TGI setup in this research is suitable for measurements of depths or thickness profiles ranging from 0.27 μm to 5 μm with a fringe visibility of more than 0.5.
format	Thesis
author	Wan Mokhdzani, Wan Nor Haimi
author_facet	Wan Mokhdzani, Wan Nor Haimi
author_sort	Wan Mokhdzani, Wan Nor Haimi
title	Microchannel interrogation with twyman-green interferometer
title_short	Microchannel interrogation with twyman-green interferometer
title_full	Microchannel interrogation with twyman-green interferometer
title_fullStr	Microchannel interrogation with twyman-green interferometer
title_full_unstemmed	Microchannel interrogation with twyman-green interferometer
title_sort	microchannel interrogation with twyman-green interferometer
granting_institution	Universiti Malaysia Perlis (UniMAP)
granting_department	School of Microelectronic Engineering
url	http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/33279/1/P.1-24.pdf http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/33279/2/Full%20text.pdf
_version_	1747836807076118528

Microchannel interrogation with twyman-green interferometer

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