APA (7th ed.) Citation

Normah, A. Characterization of alignment mark to obtain reliable alignment performance in advanced lithography.

Chicago Style (17th ed.) Citation

Normah, Ahmad. Characterization of Alignment Mark to Obtain Reliable Alignment Performance in Advanced Lithography.

MLA (8th ed.) Citation

Normah, Ahmad. Characterization of Alignment Mark to Obtain Reliable Alignment Performance in Advanced Lithography.

Warning: These citations may not always be 100% accurate.