Design, simulation and process development for Sol Single-Electron Transistor (SET) fabrication

Single-electron transistor (SET) is one of the promising nanotechnologies and distinguished by a very small device size and low power dissipation. This project explains the SET mask design, SET process flow development, and SET process and device simulation. The SET mask design consists of four l...

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Main Authors:	Amiza, Rasmi, Dahlia, Zakaria, Haniza, Yazid, Ismael Husein, Almabrouk, Mohd Faiz Aizad, Abdul Fatah, Mohd Nadhir, Ab Wahab, Mohd Nazaruddin, Yusof @ Abdul Rahman, Muhammad Naufal, Mansor, Nor Harlina, Haji Hassan, Normah, Ahmad, Shahrul Nizam, Yaakob, Siti Salwa, Mohammad Shirajuddin, Zamri, Yusoff, Zuraidawani, Che Daud, Mohsen Ali, Ahmed Murshid, Muhammad Nubli, Zulkifli, Nurhafiza, Azizan, Rajendran, Vairavan
Format:	Thesis
Language:	English English English English English English other English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English Malay English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English English
Subjects:	Sol Single-Electron Transistor (SET) Single-electron transistor (SET) Solid state electronic Silicon-on-insulator technology Single-Electron technology Semiconductor devices Polymers Biodegradable products Polyurethanes Waste paper Waste products Object detection Image processing Filter Circular Hough Transform (CHT) Capacitor Power system Capacitor banks Silicon nitride Electric insulators and insulation > Thin films Thin films Sub nano devices Ultra thin silicon dioxide MiroSot Optical data processing Optical pattern recognition Computer vision Robot vision Artificial vision Land use > Environmental aspects > Malaysia Bangunan Hijau Pembangunan hartanah Pemaju Kelestarian Modified Retinex Normalization (MRT) Infant analysis Infant psychiatry Infant face recognition Face recognition Agricultural wastes Carbon Adsorbent Chromium Heavy metal removal Semiconductor Microlitoghraphy Alignment ASML Scanner Alignment System Alignment process Neural networks (Computer science) Cognition in animals Object recognition Moment invariant Microcrystalline cellulose (MCC) Rubbers Filler Microcrystalline polymers Corrosion and anti corrosives Composites Corrosion Corrosion behaviour Biomedical materials Alloys Biomaterials Marketing Pharmaceutical industry Marketing mix strategy (MMS) Pharmaceutical industry > Yemen Ball grid array (BGA) Ball grid array technology Finite element analysis (FEA) Reliability H-Bridge Cascaded Fuel cells Inverter Multilevel Inverter Topologies Light emitting diodes High power LED Lighting industry Wireless communication Neurophysiological Body-centric Wireless Communication (BCWC) Misai kucing Orthosiphon stamineus Herbal plant Traditional medicine Citronella oil Steam distillation Essential oil Cymbopogan winterianus Glass fibre reinforced epoxy (GRE) Composite tubes Ultra-wideband antennas Wireless systems Ultra-wideband (UWB) Consumer satisfaction Service quality Public hospital > Jordan Radio resource management (Wireless communications) Wireless connections LTE WiMAX Broadband wireless connections Mobile robots Robotics Agricultural applications Mobile robots > Design and construction Titanium dioxide Photovoltaic power generation Titanium dioxide (TiO2) Dye-sensitized solar cells (DSSC) Solar cell Composite materials Modified silica (SiO2) Polypropylene (PP) Nanocomposites Rubber Latex Polymeric composites Epoxy resins Polymer blends Magnesium Mg-Zn powders Powder metallurgy Biocomposite materials Inorganic Compounds Industrialized Building Palm oil boiler ash (POBA) Palm oil waste Geopolymer Inorganic polymers Optoelectronic device Quantum dot Optoelectronic devices Auscultation Respiratory Internal sounds Computerized decision support system (CDSS) Electric vehicles > Batteries Nanofluids Cooling Automobiles > Air conditioning Automobiles > Heating and ventilation Electric vehicle (EV) Magnesium alloys Corrosion resistant alloys Metals > Anodic oxidation Anodizing Corrosion resistance Biocompatibility Microwave heating Sinter (Metallurgy) Bioceramics Water > Purification > Ozonization Water > Purification > Oxidation Ozonization Oxidation Azo dyes Dyes Bearings (Machinery) Transplanting machines Rice > Planting > Malaysia Transplanting (Plant culture) Integrated transplanter System of Rice Intensifications (SRI) Wind turbines Direct current amplifiers PID controllers Renewable energy sources Catalysts Biomass Pyrolysis Waste eggshell Catalytic pyrolysis Voluntarism Young volunteers Youth Theory of planned behavior (TPB) Lubrication systems Lubrication and lubricants Machining Nanolubricants Composite Materials Palm kernel shell (PKS) Biocomposite films Biopolymers Wireless communication systems Beamforming Hybrid Cell Downlink Optimization (HCDO) Artificial intelligence > Computer programs Large gas sensor array (LGSA) Photovoltaic cells Solar energy Renewable energy Computer software > Testing Computational grids (Computer systems) Combinatorial analysis Software compatibility > Testing Operations research > Data Processing T-way strategy Combinatorial input interaction test (CIIT) Cement composites Sustainable construction Sustainable development Electric inverters Computer algorithms Particle Swarm Optimization (PSO) Inverters Distributed generation of electric power Electric power systems DG Distributed generation (DG) Porous materials Clay Carbon nanotubes Nanostructured materials High resolution imaging Image processing > Digital techniques Image processing > Digital techniques > Mathematics Image processing > Mathematics Iterative Back Projection (IBP) Kapok Polyethylene Kapok husk (KH) Linear low density polyethylene (LLDPE) Interferometers Integrated optics Biosensors Point-of-care testing Dengue Dengue Biosensor Cathodic protection Aloi Magnesium (Mg) Anod korbanan Embedded computer systems Field programmable gate arrays Embedded system Solid oxide fuel cells Electrolytes Fuel cell Calcium carbonate Crystallography Precipitation 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power Electrospinning Nanostructures Broadband communication systems Complementary Metal Oxide Semiconductor (CMOS) Synthetic Aperture Radar (SAR) Digital images Noise Noise control Digital images > Editing > Computer programs Signal proccessing Denoising Power resources Photovoltaic power systems Solar Photovoltaic (PV) Battery Energy Storage System (BESS) Renewable Energy (RE) Cancer > Imaging Breast > Cancer Three-dimensional imaging Cancer Breast carcinoma Cognitive radio networks Wireless LANs Spectrum saturation Frequency spectrum Spectrum detection Flat panel displays Linear programming Flat panel displays > Design and constructions Flat panel displays > Production planning Patch antenna Wireless communication system Long-Term Evolution (Telecommunications) Long Term Evolution (LTE) Wireless Local Area Network (WLAN) Thermoplastics Biodegradable plastics Starch Cold Storage Refrigerated foods Thermoplastic starch (TPS) Solar panel Converters SEPIC Buck Boost MPPT Voltage Current Power Controller Logic programming Mean Field Theory (MFT) Inertial navigation systems Global Positioning System (GPS) Coordinate systems Inertial Navigation System (INS) Passive optical networks Optical fiber communication Optical communication Computer networks Communication > Computer networks Optical Code Division Multiple Access (OCDMA) Coordinate Systems 3D Frequency Selective Surfaces Frequency Selective Surfaces (FSS) Dual downlink signal Cooling systems Heat > Transmission Heat sinks (Electronics) Heat transfer Liquid coolant Proteins > Synthesis Nanoparticles Broilers (Chickens) Slaughtering Protein extraction Slaughter Polybutadiene Thin film transistors Graphene Organic thin film transistor (OTFT) Thin film Dielectric wave guides Submillimeter waves Waveguides THz Waveguides Plasma jets Atmospheric Pressure Plasma Jet (APPJ) Ionized gas Plasma Rotors Electric machinery Induction motor > Design and construction Recycled acrylonitrile butadiene rubber (rNBR) Frequency division multiple access Orthogonal Frequency Division Multiplexing (OFDM) Communication networks Telecommuncation > Traffic Internetworking (Telecommunication) Network traffic engineering Acoustic surface wave devices Piezoelectricity Aedes Mosquitoes Sensor Foamed materials Shape memory foam Polymer foam Imprinted polymers Molecularly imprinted polymer (MIP) Molecularly imprinted polymer (MIP) > Sensor
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