Design, simulation and process development for Sol Single-Electron Transistor (SET) fabrication
Single-electron transistor (SET) is one of the promising nanotechnologies and distinguished by a very small device size and low power dissipation. This project explains the SET mask design, SET process flow development, and SET process and device simulation. The SET mask design consists of four l...
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| 格式: | Thesis |
| 语言: | English |
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| 在线阅读: | http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/63459/1/Page%201-24.pdf http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/63459/2/Full%20text.pdf |
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