Fabrication of MEMS piezoresistive accelerometer for human gait analysis using laser micromachining
Gait analysis measurement is a method to access and identify gait events and the measurements of motion parameters involving the lower part of body. This significant method is widely used in rehabilitation, sports, as well as health diagnostic towards improving the quality of life. However, it is...
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my-unimap-766762022-11-02T00:42:20Z Fabrication of MEMS piezoresistive accelerometer for human gait analysis using laser micromachining Yufridin, Wahab, Prof. Dr. Gait analysis measurement is a method to access and identify gait events and the measurements of motion parameters involving the lower part of body. This significant method is widely used in rehabilitation, sports, as well as health diagnostic towards improving the quality of life. However, it is not a routine practice due to the costs involved in producing the mechanism and using gait labs. Alternatively, inertial sensors such as microcantilever accelerometer can be used in the development of cheap and wearable gait analysis systems. Human stride segmentation measurement based on micro-accelerometer cantilever is used in the study of the lower limb movement patterns that include walk, jump and run; and the measurements of the motion parameters. A complete system consists of a fabricated sensor, a Wheatstone bridge circuit and a signal amplifier tailored for real-time stride analysis measurement is proposed. As such, this thesis reporting the requirement of research studies, design, fabrication development and analysis of a MEMS acceleration sensor for gait movement measurement. Current conventional method requires high combination of dry and wet process in structuring sensor formations. A novel method for accelerometer sensor fabrication is by using laser micromachining in order to develop a simple way in realizing the sensor formation. Polysilicon doped boron material is uses as sensing material for sensor. Experimental work clearly reveals that a linearity measurement of acceleration is achievable using the fabricated sensors. The sensors also demonstrated good signal magnitudes for efficient diagnosing of movement given. This study allows us to optimize the requirements of hard-mask and fabrication process steps by reduction of 30% and 25% steps respectively. In the general framework, the research activities is focused towards development of piezoresistive cantilever formation by using laser micromachining for fast fabrication development for real life gait and stride segmentation measurement applications. Universiti Malaysia Perlis (UniMAP) Thesis en http://dspace.unimap.edu.my:80/xmlui/handle/123456789/76676 http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/76676/4/license.txt 8a4605be74aa9ea9d79846c1fba20a33 http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/76676/1/Page%201-24.pdf 09dfb44518f501787b226ac3b044f42d http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/76676/2/Full%20text.pdf 0c3918cb78cf1c976f617b8d65639349 http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/76676/3/Declaration%20Form.pdf da46c4f7055da61a70d6b5db8eff5918 Universiti Malaysia Perlis (UniMAP) Gait in humans Microelectromechanical systems Accelerometers Micromachining School of Microelectronic Engineering |
| institution |
Universiti Malaysia Perlis |
| collection |
UniMAP Institutional Repository |
| language |
English |
| advisor |
Yufridin, Wahab, Prof. Dr. |
| topic |
Gait in humans Microelectromechanical systems Accelerometers Micromachining |
| spellingShingle |
Gait in humans Microelectromechanical systems Accelerometers Micromachining Fabrication of MEMS piezoresistive accelerometer for human gait analysis using laser micromachining |
| description |
Gait analysis measurement is a method to access and identify gait events and the
measurements of motion parameters involving the lower part of body. This significant
method is widely used in rehabilitation, sports, as well as health diagnostic towards
improving the quality of life. However, it is not a routine practice due to the costs
involved in producing the mechanism and using gait labs. Alternatively, inertial sensors
such as microcantilever accelerometer can be used in the development of cheap and
wearable gait analysis systems. Human stride segmentation measurement based on
micro-accelerometer cantilever is used in the study of the lower limb movement
patterns that include walk, jump and run; and the measurements of the motion
parameters. A complete system consists of a fabricated sensor, a Wheatstone bridge
circuit and a signal amplifier tailored for real-time stride analysis measurement is
proposed. As such, this thesis reporting the requirement of research studies, design,
fabrication development and analysis of a MEMS acceleration sensor for gait movement
measurement. Current conventional method requires high combination of dry and wet
process in structuring sensor formations. A novel method for accelerometer sensor
fabrication is by using laser micromachining in order to develop a simple way in
realizing the sensor formation. Polysilicon doped boron material is uses as sensing
material for sensor. Experimental work clearly reveals that a linearity measurement of
acceleration is achievable using the fabricated sensors. The sensors also demonstrated
good signal magnitudes for efficient diagnosing of movement given. This study allows
us to optimize the requirements of hard-mask and fabrication process steps by reduction
of 30% and 25% steps respectively. In the general framework, the research activities is
focused towards development of piezoresistive cantilever formation by using laser
micromachining for fast fabrication development for real life gait and stride
segmentation measurement applications. |
| format |
Thesis |
| title |
Fabrication of MEMS piezoresistive accelerometer for human gait analysis using laser micromachining |
| title_short |
Fabrication of MEMS piezoresistive accelerometer for human gait analysis using laser micromachining |
| title_full |
Fabrication of MEMS piezoresistive accelerometer for human gait analysis using laser micromachining |
| title_fullStr |
Fabrication of MEMS piezoresistive accelerometer for human gait analysis using laser micromachining |
| title_full_unstemmed |
Fabrication of MEMS piezoresistive accelerometer for human gait analysis using laser micromachining |
| title_sort |
fabrication of mems piezoresistive accelerometer for human gait analysis using laser micromachining |
| granting_institution |
Universiti Malaysia Perlis (UniMAP) |
| granting_department |
School of Microelectronic Engineering |
| url |
http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/76676/1/Page%201-24.pdf http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/76676/2/Full%20text.pdf http://dspace.unimap.edu.my:80/xmlui/bitstream/123456789/76676/3/Declaration%20Form.pdf |
| _version_ |
1776104272020111360 |