Chai, J. H. S. (2009). Interaction effect of rca dilution, temperature and megasonic on particle removal efficiency, gate oxide quality, defect density and yield.
Chicago Style (17th ed.) CitationChai, Jane Hai Sing. Interaction Effect of Rca Dilution, Temperature and Megasonic on Particle Removal Efficiency, Gate Oxide Quality, Defect Density and Yield. 2009.
MLA (8th ed.) CitationChai, Jane Hai Sing. Interaction Effect of Rca Dilution, Temperature and Megasonic on Particle Removal Efficiency, Gate Oxide Quality, Defect Density and Yield. 2009.
Warning: These citations may not always be 100% accurate.