Process Consolidation Of Boron Steam And Emitter Diffusion In Pnp Bipolar Transistor Fabrication

Boron Steam is a process done after boron emitter diffusion for all PNP transistors and diodes. Boron emitter diffusion is a process to dope the emitter well with P-type dopant. The source of this dopant is in the form of liquid spun on the wafers and exposed to high temperatures. Boron steam is...

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Bibliographic Details
Main Author:	Abd.Wahab, Kader Ibrahim
Format:	Thesis
Language:	English English
Published:	2003
Subjects:	Boron - Isotopes - Spectra Diffusion Transistor - Effect of radiation
Online Access:	http://psasir.upm.edu.my/id/eprint/12163/1/FK_2003_22_A.pdf
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id	my-upm-ir.12163
record_format	uketd_dc
spelling	my-upm-ir.121632011-07-15T03:23:35Z Process Consolidation Of Boron Steam And Emitter Diffusion In Pnp Bipolar Transistor Fabrication 2003-03 Abd.Wahab, Kader Ibrahim Boron Steam is a process done after boron emitter diffusion for all PNP transistors and diodes. Boron emitter diffusion is a process to dope the emitter well with P-type dopant. The source of this dopant is in the form of liquid spun on the wafers and exposed to high temperatures. Boron steam is done to basically soften the residual liquid boron prior to cleaning for easy removal. This project will cover hardware comparison and recipe proposal that were used. The new consolidated process has resulted in comparable final in-line measurement of oxide thickness and test results. Reliability expectation was also met with 1000 cycles of Intermittent Operating Life test. Significant cost advantages were also achieved. Boron - Isotopes - Spectra Diffusion Transistor - Effect of radiation 2003-03 Thesis http://psasir.upm.edu.my/id/eprint/12163/ http://psasir.upm.edu.my/id/eprint/12163/1/FK_2003_22_A.pdf application/pdf en public masters Universiti Putra Malaysia Boron - Isotopes - Spectra Diffusion Transistor - Effect of radiation Faculty of Engineering English
institution	Universiti Putra Malaysia
collection	PSAS Institutional Repository
language	English English
topic	Boron - Isotopes - Spectra Diffusion Transistor - Effect of radiation
spellingShingle	Boron - Isotopes - Spectra Diffusion Transistor - Effect of radiation Abd.Wahab, Kader Ibrahim Process Consolidation Of Boron Steam And Emitter Diffusion In Pnp Bipolar Transistor Fabrication
description	Boron Steam is a process done after boron emitter diffusion for all PNP transistors and diodes. Boron emitter diffusion is a process to dope the emitter well with P-type dopant. The source of this dopant is in the form of liquid spun on the wafers and exposed to high temperatures. Boron steam is done to basically soften the residual liquid boron prior to cleaning for easy removal. This project will cover hardware comparison and recipe proposal that were used. The new consolidated process has resulted in comparable final in-line measurement of oxide thickness and test results. Reliability expectation was also met with 1000 cycles of Intermittent Operating Life test. Significant cost advantages were also achieved.
format	Thesis
qualification_level	Master's degree
author	Abd.Wahab, Kader Ibrahim
author_facet	Abd.Wahab, Kader Ibrahim
author_sort	Abd.Wahab, Kader Ibrahim
title	Process Consolidation Of Boron Steam And Emitter Diffusion In Pnp Bipolar Transistor Fabrication
title_short	Process Consolidation Of Boron Steam And Emitter Diffusion In Pnp Bipolar Transistor Fabrication
title_full	Process Consolidation Of Boron Steam And Emitter Diffusion In Pnp Bipolar Transistor Fabrication
title_fullStr	Process Consolidation Of Boron Steam And Emitter Diffusion In Pnp Bipolar Transistor Fabrication
title_full_unstemmed	Process Consolidation Of Boron Steam And Emitter Diffusion In Pnp Bipolar Transistor Fabrication
title_sort	process consolidation of boron steam and emitter diffusion in pnp bipolar transistor fabrication
granting_institution	Universiti Putra Malaysia
granting_department	Faculty of Engineering
publishDate	2003
url	http://psasir.upm.edu.my/id/eprint/12163/1/FK_2003_22_A.pdf
_version_	1747811318658760704

Process Consolidation Of Boron Steam And Emitter Diffusion In Pnp Bipolar Transistor Fabrication

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