Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization

Dalam kajian ini, struktur get HEMT dengan gatelength bersaiz 200 nm dan berprofil cendawan telah direkabentuk, difabrikasi dan dicirikan. In this research study, 200 nm gatelength HEMT gate structures with mushroom-shaped profile have been designed, fabricated and characterized.

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Bibliographic Details
Main Author:	Yusof, Ashaari
Format:	Thesis
Language:	English
Published:	2008
Subjects:	TK7800-8360 Electronics
Online Access:	http://eprints.usm.my/10407/1/FABRICATION_OF_SUBMICRON_HEMT_MUSHROOM_GATE.pdf
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id	my-usm-ep.10407
record_format	uketd_dc
spelling	my-usm-ep.104072020-01-31T07:32:09Z Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization 2008-12 Yusof, Ashaari TK7800-8360 Electronics Dalam kajian ini, struktur get HEMT dengan gatelength bersaiz 200 nm dan berprofil cendawan telah direkabentuk, difabrikasi dan dicirikan. In this research study, 200 nm gatelength HEMT gate structures with mushroom-shaped profile have been designed, fabricated and characterized. 2008-12 Thesis http://eprints.usm.my/10407/ http://eprints.usm.my/10407/1/FABRICATION_OF_SUBMICRON_HEMT_MUSHROOM_GATE.pdf application/pdf en public masters Universiti Sains Malaysia Pusat Pengajian Sains Fizik
institution	Universiti Sains Malaysia
collection	USM Institutional Repository
language	English
topic	TK7800-8360 Electronics
spellingShingle	TK7800-8360 Electronics Yusof, Ashaari Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization
description	Dalam kajian ini, struktur get HEMT dengan gatelength bersaiz 200 nm dan berprofil cendawan telah direkabentuk, difabrikasi dan dicirikan. In this research study, 200 nm gatelength HEMT gate structures with mushroom-shaped profile have been designed, fabricated and characterized.
format	Thesis
qualification_level	Master's degree
author	Yusof, Ashaari
author_facet	Yusof, Ashaari
author_sort	Yusof, Ashaari
title	Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization
title_short	Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization
title_full	Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization
title_fullStr	Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization
title_full_unstemmed	Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization
title_sort	fabrication of submicron hemt mushroom gate structure using electron beam lithography and its characterization
granting_institution	Universiti Sains Malaysia
granting_department	Pusat Pengajian Sains Fizik
publishDate	2008
url	http://eprints.usm.my/10407/1/FABRICATION_OF_SUBMICRON_HEMT_MUSHROOM_GATE.pdf
_version_	1747819858804867072

Fabrication Of Submicron HEMT Mushroom Gate Structure Using Electron Beam Lithography And Its Characterization

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