Low Voltage Rf Microelectro-Mechanical Switch Using 0.35 μm MIMOS CMOS Compatible Process

Low Voltage Rf Microelectro-Mechanical Switch Using 0.35 μm MIMOS CMOS Compatible Process

Low voltage RF MEMS switch that can be integrated with other circuits is required in the consumer product, industrial and telecommunication sector. Voltage actuation less than 10 V with simple fabrication process is desirable as most of applications need low power system with low fabrication cost....

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Bibliographic Details
Main Author: Jaafar, Haslina
Format: Thesis
Language:English
Published: 2014
Subjects:
TK1-9971 Electrical engineering
Electronics
Nuclear engineering
Online Access:http://eprints.usm.my/29034/1/LOW_VOLTAGE_RF_MICROELECTRO-MECHANICAL.pdf
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spelling my-usm-ep.290342019-04-12T05:26:04Z Low Voltage Rf Microelectro-Mechanical Switch Using 0.35 μm MIMOS CMOS Compatible Process 2014 Jaafar, Haslina TK1-9971 Electrical engineering. Electronics. Nuclear engineering Low voltage RF MEMS switch that can be integrated with other circuits is required in the consumer product, industrial and telecommunication sector. Voltage actuation less than 10 V with simple fabrication process is desirable as most of applications need low power system with low fabrication cost. Suis RF MEMS bervoltan rendah dan boleh berintegrasi dengan litar lain sangat diperlukan di dalam produk pengguna, sektor industri dan telekomunikasi. Voltan penggerak kurang daripada 10 V dengan proses fabrikasi yang mudah sangat dikehendaki kerana kebanyakan aplikasi memerlukan sistem kuasa rendah dengan kos fabrikasi yang rendah. 2014 Thesis http://eprints.usm.my/29034/ http://eprints.usm.my/29034/1/LOW_VOLTAGE_RF_MICROELECTRO-MECHANICAL.pdf application/pdf en public phd doctoral Universiti Sains Malaysia Pusat Pengajian Kejuruteraan Elektrik & Elektronik
institution Universiti Sains Malaysia
collection USM Institutional Repository
language English
topic TK1-9971 Electrical engineering
Electronics
Nuclear engineering
spellingShingle TK1-9971 Electrical engineering
Electronics
Nuclear engineering
Jaafar, Haslina
Low Voltage Rf Microelectro-Mechanical Switch Using 0.35 μm MIMOS CMOS Compatible Process
description Low voltage RF MEMS switch that can be integrated with other circuits is required in the consumer product, industrial and telecommunication sector. Voltage actuation less than 10 V with simple fabrication process is desirable as most of applications need low power system with low fabrication cost. Suis RF MEMS bervoltan rendah dan boleh berintegrasi dengan litar lain sangat diperlukan di dalam produk pengguna, sektor industri dan telekomunikasi. Voltan penggerak kurang daripada 10 V dengan proses fabrikasi yang mudah sangat dikehendaki kerana kebanyakan aplikasi memerlukan sistem kuasa rendah dengan kos fabrikasi yang rendah.
format Thesis
qualification_name Doctor of Philosophy (PhD.)
qualification_level Doctorate
author Jaafar, Haslina
author_facet Jaafar, Haslina
author_sort Jaafar, Haslina
title Low Voltage Rf Microelectro-Mechanical Switch Using 0.35 μm MIMOS CMOS Compatible Process
title_short Low Voltage Rf Microelectro-Mechanical Switch Using 0.35 μm MIMOS CMOS Compatible Process
title_full Low Voltage Rf Microelectro-Mechanical Switch Using 0.35 μm MIMOS CMOS Compatible Process
title_fullStr Low Voltage Rf Microelectro-Mechanical Switch Using 0.35 μm MIMOS CMOS Compatible Process
title_full_unstemmed Low Voltage Rf Microelectro-Mechanical Switch Using 0.35 μm MIMOS CMOS Compatible Process
title_sort low voltage rf microelectro-mechanical switch using 0.35 μm mimos cmos compatible process
granting_institution Universiti Sains Malaysia
granting_department Pusat Pengajian Kejuruteraan Elektrik & Elektronik
publishDate 2014
url http://eprints.usm.my/29034/1/LOW_VOLTAGE_RF_MICROELECTRO-MECHANICAL.pdf
_version_ 1747820066499461120

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