Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model: A Case Study

Perkembangan industri semikonduktor dalam bidang fabrikasi biasanya melibatkan kos pelaburan yang tinggi terutamanya dalam alatan photolithography. Perkembangan pesat dalam bidang industri semikonduktor kini telah memerangsangkan teknik untuk mengoptimumkan penggunaan mesin-mesin dengan efektif s...

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Main Author:	Siow, Yuen Tien
Format:	Thesis
Language:	English
Published:	2008
Subjects:	TJ1 Mechanical engineering and machinery
Online Access:	http://eprints.usm.my/31210/1/SIOW_YUEN_TIEN.pdf
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id	my-usm-ep.31210
record_format	uketd_dc
spelling	my-usm-ep.312102017-04-17T09:26:35Z Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model: A Case Study 2008-11 Siow, Yuen Tien TJ1 Mechanical engineering and machinery Perkembangan industri semikonduktor dalam bidang fabrikasi biasanya melibatkan kos pelaburan yang tinggi terutamanya dalam alatan photolithography. Perkembangan pesat dalam bidang industri semikonduktor kini telah memerangsangkan teknik untuk mengoptimumkan penggunaan mesin-mesin dengan efektif setelah membelanjakan beribu juta dalam perlaburan. Tanpa penggunaan perisian komputer yang canggih dalam analisis, adalah sukar untuk menggunakan teknik purba dalam analisis pengiraan apabila menghadapi perkembangan produk yang semakin tinggi teknologinya. Dalam kajian ini, satu model simulasi telah dibina untuk menganalisis masa mendulu dalam alatan photolithography melalui teknik yang lebih sistematik dan efektif. Model simulasi ini telah dibina berasaskan perisian computer yang memerlukan informasi yang teliti seperti mas a memproses dan juga aliran proses dalam alatan photolithography. The industry of semiconductor wafer fabrication ("fab") has invested a huge amount of capital on the manufacturing equipments particular in photolithography area which has driven the needs to re-look at the most profitable way of utilizing and operating them efficiently. Traditional industrial engineering analysis techniques through mathematical models or static models for the studies of photolithography process are simply not adequate to analyze these complex environments. In this research, a more realistic representation of photolithography tools that can give a better prediction results and a more systematic methodology for minimizing photolithography cycle time is presented. The proposed method is to reduce waiting time and increase utilization of the photolithography process, which would result in an overall equipment cycle time reduction. 2008-11 Thesis http://eprints.usm.my/31210/ http://eprints.usm.my/31210/1/SIOW_YUEN_TIEN.pdf application/pdf en public masters Universiti Sains Malaysia Pusat Pengajian Kejuruteraan Mekanikal
institution	Universiti Sains Malaysia
collection	USM Institutional Repository
language	English
topic	TJ1 Mechanical engineering and machinery
spellingShingle	TJ1 Mechanical engineering and machinery Siow, Yuen Tien Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model: A Case Study
description	Perkembangan industri semikonduktor dalam bidang fabrikasi biasanya melibatkan kos pelaburan yang tinggi terutamanya dalam alatan photolithography. Perkembangan pesat dalam bidang industri semikonduktor kini telah memerangsangkan teknik untuk mengoptimumkan penggunaan mesin-mesin dengan efektif setelah membelanjakan beribu juta dalam perlaburan. Tanpa penggunaan perisian komputer yang canggih dalam analisis, adalah sukar untuk menggunakan teknik purba dalam analisis pengiraan apabila menghadapi perkembangan produk yang semakin tinggi teknologinya. Dalam kajian ini, satu model simulasi telah dibina untuk menganalisis masa mendulu dalam alatan photolithography melalui teknik yang lebih sistematik dan efektif. Model simulasi ini telah dibina berasaskan perisian computer yang memerlukan informasi yang teliti seperti mas a memproses dan juga aliran proses dalam alatan photolithography. The industry of semiconductor wafer fabrication ("fab") has invested a huge amount of capital on the manufacturing equipments particular in photolithography area which has driven the needs to re-look at the most profitable way of utilizing and operating them efficiently. Traditional industrial engineering analysis techniques through mathematical models or static models for the studies of photolithography process are simply not adequate to analyze these complex environments. In this research, a more realistic representation of photolithography tools that can give a better prediction results and a more systematic methodology for minimizing photolithography cycle time is presented. The proposed method is to reduce waiting time and increase utilization of the photolithography process, which would result in an overall equipment cycle time reduction.
format	Thesis
qualification_level	Master's degree
author	Siow, Yuen Tien
author_facet	Siow, Yuen Tien
author_sort	Siow, Yuen Tien
title	Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model: A Case Study
title_short	Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model: A Case Study
title_full	Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model: A Case Study
title_fullStr	Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model: A Case Study
title_full_unstemmed	Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model: A Case Study
title_sort	cycle time analysis for photolithography tools in semiconductor manufacturing industry with simulation model: a case study
granting_institution	Universiti Sains Malaysia
granting_department	Pusat Pengajian Kejuruteraan Mekanikal
publishDate	2008
url	http://eprints.usm.my/31210/1/SIOW_YUEN_TIEN.pdf
_version_	1747820404118913024

Cycle Time Analysis For Photolithography Tools In Semiconductor Manufacturing Industry With Simulation Model: A Case Study

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