GeSn Film Deposited By Rf Magnetron Sputtering For Photodetector Applications
Di dalam tesis ini, filem aloi semikonduktor Ge1-xSnx telah disediakan melalui sistem percikan magnetron RF dalam usaha menumbuhkan filem pada suhu rendah untuk mengelakan pengasingan Sn pada permukaan. Sifat struktur, optik dan elektrik lapisan tersebut di atas substrat Si disiasat untuk aplikasi o...
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2017
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my-usm-ep.388512019-04-12T05:24:59Z GeSn Film Deposited By Rf Magnetron Sputtering For Photodetector Applications 2017-07 Sheikh Sarmast, Hadi Mahmodi QC1-999 Physics Di dalam tesis ini, filem aloi semikonduktor Ge1-xSnx telah disediakan melalui sistem percikan magnetron RF dalam usaha menumbuhkan filem pada suhu rendah untuk mengelakan pengasingan Sn pada permukaan. Sifat struktur, optik dan elektrik lapisan tersebut di atas substrat Si disiasat untuk aplikasi optoelektronik In this thesis, the Ge1-xSnx semiconductor alloy films have been prepared through RF magnetron sputtering to grow the film at low temperature to suppress the Sn surface segregation. The structural, optical, electrical properties of the grown Ge1-xSnx alloy films on silicon (Si) substrate were investigated for optoelectronic applications 2017-07 Thesis http://eprints.usm.my/38851/ http://eprints.usm.my/38851/1/GeSn_film_deposited_by_RF_magnetron_sputtering_for_photodetector_application_by_Hadi_Mahmodi_Sheikh_Sarmast..pdf application/pdf en public phd doctoral Universiti Sains Malaysia Pusat Pengajian Sains Fizik |
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Universiti Sains Malaysia |
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English |
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QC1-999 Physics |
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QC1-999 Physics Sheikh Sarmast, Hadi Mahmodi GeSn Film Deposited By Rf Magnetron Sputtering For Photodetector Applications |
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Di dalam tesis ini, filem aloi semikonduktor Ge1-xSnx telah disediakan melalui sistem percikan magnetron RF dalam usaha menumbuhkan filem pada suhu rendah untuk mengelakan pengasingan Sn pada permukaan. Sifat struktur, optik dan elektrik lapisan tersebut di atas substrat Si disiasat untuk aplikasi optoelektronik
In this thesis, the Ge1-xSnx semiconductor alloy films have been prepared through RF magnetron sputtering to grow the film at low temperature to suppress the Sn surface segregation. The structural, optical, electrical properties of the grown Ge1-xSnx alloy films on silicon (Si) substrate were investigated for optoelectronic applications
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format |
Thesis |
qualification_name |
Doctor of Philosophy (PhD.) |
qualification_level |
Doctorate |
author |
Sheikh Sarmast, Hadi Mahmodi |
author_facet |
Sheikh Sarmast, Hadi Mahmodi |
author_sort |
Sheikh Sarmast, Hadi Mahmodi |
title |
GeSn Film Deposited By Rf Magnetron Sputtering For Photodetector Applications |
title_short |
GeSn Film Deposited By Rf Magnetron Sputtering For Photodetector Applications |
title_full |
GeSn Film Deposited By Rf Magnetron Sputtering For Photodetector Applications |
title_fullStr |
GeSn Film Deposited By Rf Magnetron Sputtering For Photodetector Applications |
title_full_unstemmed |
GeSn Film Deposited By Rf Magnetron Sputtering For Photodetector Applications |
title_sort |
gesn film deposited by rf magnetron sputtering for photodetector applications |
granting_institution |
Universiti Sains Malaysia |
granting_department |
Pusat Pengajian Sains Fizik |
publishDate |
2017 |
url |
http://eprints.usm.my/38851/1/GeSn_film_deposited_by_RF_magnetron_sputtering_for_photodetector_application_by_Hadi_Mahmodi_Sheikh_Sarmast..pdf |
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1747820708923179008 |