Molecular Mechanics Simulations Of Quartz Etching Process
In this thesis, the physical etching of argon bombardment onto α-quartz and amorphous quartz substrates were studied and investigated using molecular mechanics methods. Although there are extensive studies on quartz etching, larger numbers of the research are experimental and the studies focus on th...
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| Format: | Thesis |
| Language: | English |
| Published: |
2016
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| Online Access: | http://eprints.usm.my/41151/1/ABDUL_HAADI_BIN_ABDUL_MANAP_24_Pages.pdf |
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