APA (7th ed.) Citation

Lok , Y. H. (2009). Particle Removal In Post Chemical-Mechanical Planarization (Cmp) Cleaning Process: Experimental And Modeling Studies.

Chicago Style (17th ed.) Citation

Lok , Yian Han. Particle Removal In Post Chemical-Mechanical Planarization (Cmp) Cleaning Process: Experimental And Modeling Studies. 2009.

MLA (8th ed.) Citation

Lok , Yian Han. Particle Removal In Post Chemical-Mechanical Planarization (Cmp) Cleaning Process: Experimental And Modeling Studies. 2009.

Warning: These citations may not always be 100% accurate.